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我們提供您
--- 創新與實用的半導體專用
顯微鏡暨影像技術
最佳光學解晰
- 最佳數位影像品質 -
最佳顯微鏡自動化 - 最佳服務技術支援
- 最佳投資效益
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Vistec
( Leica ) 獨家最新的半導體檢視專用水鏡
PL
200x / 1.20 DUV WI
超高解析,
超高倍率
! |
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| UV
technology
: resolution |
0.12
µm |
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| DUV
technology
: resolution |
0.08
µm |
| DUV
WI technology
: resolution |
0.06
µm |
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| Vistec
INM
100 |
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The
Vistec INM100 is an optical inspection
microscope for versatile routine inspection
and failure analysis of masks and wafers in
semiconductor MEMS, Optoelectronics and Hard
Disk technologies. |
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| Vistec
INM
100 IR |
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The
extension of the wavelength range to
infrared enables the user to look
"through" the silicon wafer
allowing inspection of defects and failures,
which cannot be detected and visualized by
other methods. |
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| Vistec
INM
200 UV |
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All
imaging modes BF, DF and DIC and UV
illumination are available The universal
modular concept allows system variations
from the manual "stand-alone"
inspection microscope for masks and wafers
of all sizes to the fully automatic
inspection and review station Vistec
INS3000. |
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| Vistec
INM
300 DUV/UV |
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With
the Vistec INM300 DUV/UV, Vistec offers the
latest advance in optical imaging, combined
with the highest degree of automation for
sample sizes up to 300 x 300mm. |
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| Vistec
INH
300 DUV |
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Based
on the field proven inspection and review
platform INS3300 DUV this new OEM head
offers the possibility of three wavelength
ranges on one system (VIS, UV 365nm and DUV
248nm). The illumination modes BF, DF and
DIC are additionally available and of course
Vistec’s unique laser focus system. |
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| Vistec
INH
200 |
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Based
on the field proven microscope Vistec
INM200, the OEM head INH200
combines highest
performance optics capable of UV, BF, DF and
DIC, highly precise real time Autofocus and
easy implementation into the host system. |
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| Vistec is
offering a comprehensive set of
objectives, tube-lenses and
beam-splitters covering a variety of
applications. Imaging modes: BF, DF,
VIS, UVI, UV (365nm), DUV (248nm), DUV
WI, IR (1050-1550nm), Objective
Magnifications: 1.25x to 200x (DUV
WI).
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德國
VDS 數位 CCD 攝影機 以及 Leica
數位 CCD 攝影機, 高速高解析,
可配合 IM-1000 量測分析軟體,
網路連線, 資料庫管理. |
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