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INM 100
(
Wide-Field, Confocal )
Wafer
& Mask Inspection Microscope
半導體晶圓鏡檢顯微鏡
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INM
100 可依照應用需要做組配整合 :
-
Wide-Field
Microscopy : 明視野, 暗視野, 干涉對比, 螢光.
-
Confocal
Microscopy : 共軛焦影像斷層掃描觀察
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| INM 100
是晶圓與光罩檢視的最佳光學顯微鏡 (
包括液晶顯示板 LCD, 光碟 CD, 硬碟 Hard-disc,
品管與製程管理應用, 目前, 也包括許多微機電應用
MEMS, Nanotechnology ),
是先進的半導體廠或電子廠所必備的設備.
具有 Leica 獨家的新一代的 HC ( Harmonic Contrast ) 光學技術,
提供最佳光學平衡管理,
超高光學解析, 讓你看到次微米解析,
達到光學解析理論的極限.
使用上最具人性化的人因公學設計,
自動化控制提供最高的投資與使用效益.
Class-1
的規劃, 合符新一代的半導體製程所需.
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| INM 100
的觀察對比可依需要擴充,
包括明視野, 暗視野, 干涉對比,
螢光. 例如 : |
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明視野
(
BF ) : shapes, layer, etch quality. |
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暗視野
(
DF ) : edge roughness, surface impurities. |
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螢光
(
FL ) : residual photoresist, contamination |
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干涉對比
(
DIC ) : changes in topography or refractive
index. ( 以顏色及亮度改變 ), 表面立體影像觀察 |
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共軛焦影像
(
Confocal Contrast ) 能提高解析
( 小於 0.2 微米 ), 提高觀察對比與景深,
能類似電腦斷層掃描, 讓使用者一層一層做掃描觀察與影像擷取,
配合數位影像系統, 可做 3D 立體重建, 共觀察與量測分析.
在觀察倍數可擴增到 10,000x. 同時, 可同時將共軛焦影像與
DIC (
wide-field ) 影像做重疊觀察與影像擷取,
操作上, 只要單一按鍵即可達到自動切換
( WF -
CF ). |
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- 紫外光學技術
( UV imaging ) 提供超高解析至 120 nm ( 0.12
微米 ), 因應新一代的製程所需. 物鏡為 UV
150x/0.90 365 nm.
只要單一按鍵即可達到自動切換 ( WF - CF or
UV ). 具有選配 UV-專用攝影鏡筒模組及 UV-攝影機
( 類比 或 數位 ). 最高影像擷取倍率
16,000x.
- 擁有全世界最好的 UV 及 DUV
光學顯微鏡製造關鍵技術.
INM 100 提供給 200
nm 晶圓 ( 或 光罩 ) 觀察, 可擴增共軛焦或UV-影像擷取,
操作上, 只要單一按鍵即可達到自動切換.
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- INM 100 完全合符人體工學設計, 讓使用人員輕輕鬆鬆操控顯微鏡功能.
- Ergotube
FSA-V ( 可選配電控式 ), 內間電控分光鏡,
可控制光路
- 晶圓用的
205
x 205 mm 載物台, 有手動及電控 (
特殊選配 ) 兩種供選用. 本公司亦可依照客戶需求,
提供特殊電控載物檯,.光罩 ( mask )
用附加載物盤.
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| INM 100 Specifications |
| Purpose |
Inspection
and quality control |
| Optics |
unique
Leica HC optics for all imaging modes, FOV 25 mm. |
| INM
100 configuration |
Wide-field,
Confocal, Motorized 6-place nosepieces. |
| Microscope
stand for incident & transmitted light |
8
inch stand with built-in transformer for the 12V
100W Halogen lamp. Motorized objective revolver
and programmable aperture diaphragm. |
| Flexible
sample height |
Standard
= 25 mm |
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Optional
flexible intermediate piece = up to 66 mm |
| Focusing
drive |
Switchable
coaxial coarse and fine focus drive. |
| Z-travel
range = 25 mm |
| Coarse
focus stroke per rotation = 5 mm |
| Fine
focus stroke per rotation = 0.1 mm |
| Ultra-fine
focus stroke per rotation = 0.02 mm |
| Revolving
nosepiece |
Motorized
sixtuple nosepiece, magnification changeable via
built-in keys. |
| Imaging
contrasts |
Brightfield,
Darkfield, Interference Contrast ( DIC ),
Fluorescence and Confocal
Contrast (
CF ) selectable via image control wheel. |
| Microscope
stage |
Mechanical
stage ( 205 x 205 mm ) with fast positioning
handle. The stage has 8"
transmitted
light capability. |
| Observation
tube |
Widefield
tilting trinocular tube |
| Ergonomy
tube FSA-V ( inclinable 0 - 35 degrees ) |
| Objectives |
Ultra-high
performance HC objectives.
Wide range
of objectives series from 1.6x - 250x. |
| Magnification |
16x
- 4000x ( > 9000x with the optional confocal
module ) |
| Resolution |
Wide-Field
: less than 0.3 µm |
| Confocal
: less than 0.2 µm |
| Eyepiece |
HC
PLAN 10x/25 |
| Options |
Transmitted
light outfit |
| Interference
contrast ( DIC ) |
| Fluorescence
outfit |
| Confocal
Module |
| Magnification
Changer |
| Light
sources |
12V/100W
Halogen ( RL ) |
| 12V/20W
Halogen ( TL, optional ) |
| Stabilized
power supply, built-in. |
| HG
100, Stabilized, for Confocal contrast ( optional
Xenon 75W for FL ) |
| Filter
module |
Optional,
4-filters ( diameter 32 mm ) |
| Confocal
Module |
Automatic
module for Confocal Contrast with 2 confocal
modes. |
| Microscope
dimensions |
W
: 618 mm, Front to Back : 945 mm, Height : 550 mm |
| Electrical
connections |
AC
220 V - 50 Hz |
| AC
110 V - 60 Hz |
| Power
consumption 250 vA max. |
| Others
accessories |
Dual
TV adapter with two cameras ( one for UV
application ) |
| Variable
C-Mount TV adapter |
| Digital
Camera |
| UV-Camera |
| Imaging
software |
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| HC-series Objectives for INM-series microscope |
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| Vistec
( Leica ) UV
150x/0.90 365 nm ( UV objective ) |
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| INM 100 Safety & Reliability |
| Class
1 cleanliness |
| ISO
9001 Certified |
| CE-Marking,
full compliance with EU regulations |
| Safety,
IEC 1010 |
| EMI,
CISPR 11/14, EN 55014, IEC 1000 |
| MTBF
: > 2000 h |
| MTBA
: > 1000 h |
| MTTR
: < 2 h ( according to SEMI E10-92 ) |
| Down
time : < 1% unscheduled |
| MTTA
: < 5 min. |
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詳細規格與組配報價,
請洽本公司. |
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