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顯微鏡的 Z 軸 (縱深) 調焦控制, 可作 3D 斷層掃描及影像擷取,也就是所謂的
Optical section.
利用紅外雷射光反射原理作即時自動對焦, 有效應用於工業的半導體晶圓檢視, 一些應用包括液晶面板,
硬碟.....等. |
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LEICA 創新的數位軟體控制自動對焦, 精準, 高速, 適用各種倍率的物鏡.
目前僅搭配於 AF6500 及 AF7000 影像系統.
使用者可輕鬆且快速取得長時間的完全聚焦影像. |
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自動對焦, ( Auto Focus )
- 生醫應用 |
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The ASIimaging - CRIFF module fits on the camera
port of most microscopes. The unit contains a dichroic beam splitter that allows visible light
to go to a camera while reflecting the 780 nm
laser light. The CRIFF module has provision for
a blocking filter in front of the
camera.Maintain long-term precise
nanometer-scale continuous focusing – perfect
for TIRF Microscopy
- 僅適用高NA ( > 1.40 ) 油鏡 |
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CRIFF-controlled
Z-axis Resolution |
< 5 nm |
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CRIFF-controlled
Z-axis Drift |
< 40 nm per
hour |
| CRIFF
Response Time |
< 0.5 seconds |
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自動對焦, ( Auto Focus )
- 工業應用 |
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FocusTrac™ Laser Auto
Focus System from Motion X Corporation
provide real time focus for most infinite
conjugate microscope systems including those
manufactured by Olympus, Leica, Nikon, Zeiss,
and Mitutoyo. It can also be configured to work
with many older finite conjugate microscope
systems as well as individual telecentric
optics. The FocusTrac™ is able to
differentiate between "in-focus", "above focus"
and "below focus" conditions to produce a
relative error signal that can be used to drive
the position of the microscope and optics
relative to the sample of interest into an “in
focus” condition |
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雷射自動對焦的相關工業應用領域及範例介紹 |
Data Storage
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FocusTrac™ Laser Auto
Focus Systems are used in hard disk
drive component inspection systems. These
include inspection of both read write heads
and media. In the case of read write heads,
the system consists of a precision X - Y
stage and Z column, optical microscope, CCD
camera, frame grabber, motion controller,
FocusTrac™ and host computer. The system
is designed to inspect trays full of read
write head sliders prior to the heads being
assembled into head gimble assemblies (HGAs).
By reviewing the pole tips on the sliders
and capturing the dimensions of these pole
tips the system is able to determine which
sliders are manufactured properly without
electrically testing the head itself. The
automation of this process utilizing the
laser auto focus results in significant
increases in throughput and reduction of
personnel required to perform the
inspection.
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Semiconductor
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FocusTrac™ Laser Auto
Focus Systems are used in semiconductor
inspection systems. These include inspection
of wafers, bag assemblies, and discrete
devices. In the case of wafer inspection,
the FocusTrac™ has been applied to a
number of automated optical inspection
systems for defect review and critical
dimension inspection. Systems use the
FocusTrac™ to map the wafer Z heights
under an optical microscope before moving
the wafer under the inspection laser/imaging
system and applying the mapped information
to the tool to make the necessary
adjustments in Z to maintain focus during
the actual inspection process. The result is
a significant increase in throughput and
also a reduction of errors in the process.
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Ink Jet
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FocusTrac™ Laser Auto
Focus Systems are used in ink jet mask
inspection systems. The system consists of a
precision X - Y open frame stage with a
transmitted light illumination system and Z
column, optical microscope, CCD camera,
frame grabber, motion controller,
FocusTrac™, an air bearing objective
actuator and host computer. The system is
designed to inspect ink jet masks for
defects in individual nozzles prior to the
mask being diced into cartridge size
components. Automation of the system
requires constant velocity of the X - Y
stage, which is phase lock looped with the
strobe of the illumination and triggering of
the vision system to capture images on the
fly. The key to this is maintaining constant
focus of the image; this is accomplished
through the use of the LAF and also requires
the use of a custom designed air bearing
actuator to move the 3x objective at a band
width of > 50Hz. The automation of this
process utilizing the FocusTrac™
results in significant increases in
throughput and reduction of personnel
required to perform the inspection.
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Razor Blade
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FocusTrac™ Laser Auto
Focus Systems are used in razor blade
inspection systems. The system consists of a
precision X - Y stage and Z column, optical
microscope, CCD camera, frame grabber,
motion controller, FocusTrac™ and
host computer. The system is designed to
inspect razor blades capturing the points of
the 3 angle transitions on the blades edge.
The system is able to determine which blades
are manufactured properly without
destructive testing. The automation of this
process utilizing the FocusTrac™
results in significant increases in
throughput and reduction of personnel
required to perform the inspection.
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Reflective Optics
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FocusTrac™ Laser Auto
Focus Systems are used in reflective
optic inspection systems. Inspection of
reflective optics requires an auto focus
system capable of finding focus on very flat
spectral surfaces. This is a very difficult
task for a video based auto focus system due
to the lack of topography on the optic being
inspected. The FocusTrac™ Laser Auto
Focus is ideal for this application
since it does not require topography to find
focus, unlike a video based auto focus
system, the FocusTrac™ Laser Auto Focus
System uses the reflective nature of the
optic being inspected for its return signal.
Use of the FocusTrac™ Laser Auto Focus
in an reflective optic inspection system has
the potential to increase the throughput of
the inspection process by 10X or greater.
The FocusTrac™ Laser Auto Focus can
also be used in some non-reflective optic
inspection systems, but this is dependent on
the optical material and dimensions of the
optic to be inspected.
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Photovoltaic (PV)
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FocusTrac™ Laser Auto
Focus Systems are used in PV inspection
systems. The spectral characteristics of the
photovoltaic materials are very similar to
those of semiconductors but without the
topology resulting in an ideal surface for
the FocusTrac™ to function. Use of the
FocusTrac™ in PV inspection has the
potential to increase the throughput of
inspection processes by 10x or greater.
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Diamond Fly Cutting
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FocusTrac™ Laser Auto
Focus Systems are used in diamond fly
cutting tools used to remove material and
produce a highly polished surface quality on
focal plane arrays (FPAs). In the
application, the FocusTrac™ is used
to determine the offset between the cutting
tool and the top surface of the FPA to be
cut. The use of FocusTrac™ in this
system eliminates the need for the operator
to manually find the relationship of the
cutting tool to the surface to be cut
resulting in a significant increase in
throughput and uniformity of the performance
of the diamond fly cutting tool.
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Micro-Electro-Mechanical Systems (MEMS)
Devices
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FocusTrac™ Laser Auto
Focus Systems are used in inspection
systems for defect review of (MEMS) devices.
The FocusTrac™ is integrated into a (MEMS)
inspection microscope system to review the
wafer level dies before dicing into
individual devices. The use of the
FocusTrac™ in this system results in a
substantial increase of throughput and
reduction of operator errors in the
inspection process.
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Laser Ablation
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FocusTrac™ Laser Auto
Focus Systems are used in a number of
laser ablation systems including; direct
write lithography, flat panel display (FPD)
repair tools, laser cutting, hole drilling
and welding systems.
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電控馬達調焦 ( Motorz Z-drive
) 及壓電調焦控制 ( Piezo Z-drive ) |
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多功能的控制模組化控制器 |
依照您的硬體及應用,
模組化組裝的選配控制器 |
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MAC
6000 controller |
MAC
6000 with optional module |
LUDL
MAC 6000 型錄下載 |
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73006054 Dual Microstepping Motor Driver
The LEP Dual Microstepping
Motor Driver is designed to work with precision
automation devices. The drive is capable of very
high microstep resolution; up to 40,000 microsteps
per revolution with a standard 1.8 degree stepper
motor. The drive module can source up to 2 amps per
phase at 24 volts. The motor current is precision
regulated by the microprocessor. Designed expressly
for precision instrumentation, the unique DC linear
power regulation of the MAC 6000 Microstepping Motor
Driver provides the highest performance and
precision without excessive motor heating or EMI
radiation that can sometimes be a problem with
conventional microstepping drives. The LEP Dual
Microstepping Motor Driver has inputs for end
limits, pre-limits (deceleration), and index
signals. In addition, the motor driver supports
manual control with joystick (analog) and/or
trackball (digital) inputs. For integration with
high throughput systems, there are digital sync
inputs and outputs to link motor position to signal
acquisition.
73006042 Interface Module
The MAC 6000 interface module
is the brain of the MAC 6000 system. This module
processes all of the commands from host systems,
supervises all of the modules on the MAC 6000
‘stack’ and executes scripts for autonomous control.
The MAC 6000 interface provides dual RS-232 ports,
USB and Ethernet connectivity … simultaneously. Each
interface option functions as an independent
communications port enabling configuration
flexibility and the possibility of more than one
host connection. The MAC 6000 command set maintains
compatibility with previous MAC 5000 system. A MAC
6000 specific command set provides state of the art
communication with streamlined commands and
programmable event based messaging. For example,
utilizing the event based messaging, the MAC 6000
can be configured to send a message to the host
computer when a device has begun it move, stopped or
changed position. This type of messaging eliminates
the common, inefficient polling loops that are
required with most systems. Your microscope is a web
server! The MAC 6000 has built-in web server
capability. Primarily provided to make system
configuration easier, the web server function can be
used for remote control and monitoring of the system
or to provide a simple, universal local display of
system status. The possibilities are endless.
73006055 Dual DC Servo Motor Driver
The Dual DC Servo
Motor Driver is capable of driving two independent
DC servo motors. For applications that require high
speed and high power DC servo motors are often
used. Designed for precision instrumentation, with
high resolution encoders, the DC Servo Motor Driver
features fully programmable servo parameters along
with command compatibility with the
LEP Dual Microstepping Motor
Driver.
This module has inputs for end limits, pre-limits
(deceleration), and index signals. In addition, the
motor driver supports manual control with joystick
(analog) and/or trackball (digital) inputs. For
integration with high throughput systems, there are
digital sync inputs and outputs to link motor
position to signal acquisition.
73006056 Focus Control Module
Focus motor control
requires more than a simple motor drive. The Focus
control module is a single axis version of the
73006054 Dual Microstep Motor
Drive
with additional capability such as electronic motor
disengagement, high resolution encoder feedback
inputs and additional manual control features. Like
the 73006054 Drive, the Focus Control Module is
designed for optimum performance with the LEP focus
motors optionally utilizing linear encoder feedback.
The high stability and low EMI make this device
especially suited to the laboratory environment
where sensitive electronic instrumentation can be
affected by some types of motion control.
73006063 Piezo Drive Module
The MAC 6000 solution for Piezo
transducer control is the 73006063 Piezo Drive
Module. This module provides high resolution, high
performance control for the Piezo focus devices.
This module is very flexible and achieves the high
speed with resolution that is required for
demanding, cutting-edge microscopy techniques.
Featuring very flexible and powerful control modes,
the Piezo Drive module can be controlled with
standard LEP MAC 6000 motion commands, analog
control signals and digital control signals. Manual
control is also available for interactive operation.
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| 電控調焦
( Piezo Z-Stage ) |
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電控調焦
( Motor Z-drive ) |
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Nano Positioning – Piezo Focus
rapid,
precise focus control. The LEP Piezo Z-stage
insert addresses these requirementsand provides
the highest performance in a convenient
form-factor that is easily adaptedto most
inverted microscope stages.
The insert
provides a stable platform for large and small
specimens including industrystandard multi-well
plates, 1”x3” and 2”x3” glass slides as well as
culture dishes. Themany different specialized
applications as well as general microscopy. With
either 200 or 500 microns of travel the Piezo
Z-stage can provide high performance focus
control for a wide range of applications.
The Piezo
Z-stage integrates with the MAC 5000 automation
controller system.
Additional
control boxes are not necessary. A dedicated MAC
5000 module provides full 16 bit resolution,
digital position feedback and sophisticated
electronic triggering options. An additional
analog control interface is also provided for
high speed synchronized operation. Digital
control of the SGS position feedback eliminates
manual offset adjustments for long-term
accuracy.
Software
bridge commands for the Piezo Z-stage are
compatible with standardMAC 5000 motor commands.
Most software developed for the standard
motorized focus,will integrate transparently
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Standard Motor Drive
73000365
The standard automated focus is a motor coupled to
the fine focus of the microscope. The LEP
precision stepper motor drive can provide very
high resolution: up to 2.5 nanometers. An optional
linear encoder can be integrated with the focus
motor. The encoder is fixtured to the microscope
body so that it provides real-time measurement of
the stage height in relation to the optics. The
result is a stable, highly accurate performance
that can dynamically compensate for focus drift
and drive errors.
Manual control of the motorized focus is also very
important. The 73000365 digipot control provides
positive feedback similar to a conventional
microscope but with higher accuracy and less
uncertainty.
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LUDL
Piezo Z-stage & Focus control 型錄下載 |
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訂購需知 :
Part Number
Description
( add-on for existing MAC 5000 system )
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99A600 Piezo
Z-stage insert for LEP Inverted stage with 200
micron travel
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99A601 Piezo
Z-stage insert for LEP Inverted stage with 500
micron travel
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73005063 MAC
5000 Piezo control module
example: 200 micron travel stand-alone
system
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99A600 Piezo
Z-stage insert for LEP inverted stage
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995001 MAC
5000 base system, includes power supply and
interface
- 73005063 MAC 5000 Piezo
control module
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相關電控載物檯及調焦控制............... |
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